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Vacuum Equipment Versus 74 – Izovac | all.biz
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Vacuum Equipment Versus 74
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Vacuum Equipment Versus 74

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Belarus, Minsk
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Technical characteristics
  • BrandIzovac
  • Country of manufactureBelarus
Description
Distinctive features:

- one - sided or two - sided spraying

- ion source cleaning

Specifications
The sizes of processable substrates 48h60h1, 0; 48h60h0, 5; 48h60h0, 25; 30h24h0, 3; 30h24h0, 2 mm
support materials polycor, glass ceramics, etc.
Number of simultaneously processed wafers 48h60 not less than 40 pieces.
Coating Method application of coatings by thermal evaporation, optionally possible to install a magnetron sputtering
technological devices Resistive evaporator capacity of 2kW - 1 pc;

Electronic Vaporizer with an annular cathode power of 2. 5 kW - 2 pieces;

Source ion cleaning.

substrate heating temperature 300 of the C.

Variation of temperature carousel - no more than ± 5 ° C.

The accuracy of the temperature - not more than ± 5 ° C.

The spread thickness of a dusty film carousel not more than ± 5% .
Control of the deposited film thickness on the quartz sensor

Resistive sample - "witness" manufactured on pyroceramics substrate dimensions 30. 0 x 3 mm, formed between the contact pads window for dust length of 6 mm (2 square

carousel rotation speed adjustable in the range of 0 ÷ 30 rev / min
pumping system high vacuum turbo pump;

low vacuum pump volute.

Limiting residual pressure 8h10 - 5Pa.
Pumping time up to a pressure of 2 × 10 - 4 Pa no more than 30 minutes
Cooling from recirculator installed for cooling technological devices

 

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Vacuum Equipment Versus 74
Vacuum Equipment Versus 74
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