Vacuum Equipment Versus 74
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Technical characteristics
- BrandIzovac
- Country of manufactureBelarus
Description
Distinctive features:
- one - sided or two - sided spraying
- ion source cleaning
Specifications
- one - sided or two - sided spraying
- ion source cleaning
Specifications
The sizes of processable substrates | 48h60h1, 0; 48h60h0, 5; 48h60h0, 25; 30h24h0, 3; 30h24h0, 2 mm |
support materials | polycor, glass ceramics, etc. |
Number of simultaneously processed wafers 48h60 | not less than 40 pieces. |
Coating Method | application of coatings by thermal evaporation, optionally possible to install a magnetron sputtering |
technological devices | Resistive evaporator capacity of 2kW - 1 pc;
Electronic Vaporizer with an annular cathode power of 2. 5 kW - 2 pieces; Source ion cleaning. |
substrate heating temperature | 300 of the C.
Variation of temperature carousel - no more than ± 5 ° C. The accuracy of the temperature - not more than ± 5 ° C. |
The spread thickness of a dusty film carousel | not more than ± 5% . |
Control of the deposited film thickness | on the quartz sensor
Resistive sample - "witness" manufactured on pyroceramics substrate dimensions 30. 0 x 3 mm, formed between the contact pads window for dust length of 6 mm (2 square |
carousel rotation speed | adjustable in the range of 0 ÷ 30 rev / min |
pumping system | high vacuum turbo pump;
low vacuum pump volute. |
Limiting residual pressure | 8h10 - 5Pa. |
Pumping time up to a pressure of 2 × 10 - 4 Pa | no more than 30 minutes |
Cooling | from recirculator installed for cooling technological devices |
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Vacuum Equipment Versus 74